Electronic Devices and Materials
The Electronic Devices & Materials Group (EDM Group) consists of approximately 30 group members, including four full time teaching staff, and is part of the Electrical Division of Cambridge University Engineering Department. The Head of the Group, Professor Bill Milne, is also head of the Division. The Group's research covers a broad spectrum with interests including large area silicon and carbon materials, the fabrication of thin film transistors, miroelectromechanical devices, nanoelectronics and high-k dielectrics.
To this end, the Group has four main laboratories. Our Thin Film Laboratory contains a range of chemical vapour deposition equipment, including Electron Cyclotron Resonance, Electron Cyclotron Wave Resonance and a parallel plate rf-PECVD. We have also a Filtered Cathodic Vacuum Arc apparatus, three reactive ion etch systems, a magnetron sputterer and a thermal evaporator. Plasma characterisation is possible by optical emission spectroscopy and residual gas analysis. The Divisional Class 100/1000 Clean Room contains all the necessary equipment for photolithographic processing down to 1 mm resolution and both wet and dry etching. Our Measurement Laboratory houses electrical and optical measurement systems. These include four three probe measurement systems allowing temperature controlled current-voltage and capacitance-voltage analysis of devices, four parallel plate field emission systems, UV-visible and infrared spectrometry and constant photocurrent absorption measurements. We have also recently opened a new Class 100 Device Processing Clean Room. This is equipped with a new double sided EVG Mask Aligner with a 0.5 mm resolution and a new MVSystems reactive ion etch reactor.
University of Cambridge
Department of Engineering
