Sir Charles Oatley and the Scanning Electron Microscope
Contents Vol 133
Part I INTRODUCTION
1.1 Charles Oatley: Father of Modern Scanning Electron Microscopy
K.C.A. Smith and D. McMullan1.2 The Early History of the Scanning Electron Microscope (Reprinted from J.Appl.Phys. 53, R1-R13 (1982))
C.W. Oatley
Part II THE SCANNING ELECTRON MICROSCOPE
AT THE CAMBRIDGE UNIVERSITY ENGINEERING DEPARTMENT
2.1A The Development of the First Cambridge Scanning Electron Microscope, 1948-1953
D. McMullan2.1B An Improved Scanning Electron Microscope for Opaque Specimens
(Reprinted from Proc.I.E.E. 100, Part II, 245-259 (1953)) D. McMullan2.2A Exploring the potential of the Scanning Electron Microscope.
K.C.A. Smith2.2B The Scanning Electron Microscope and its Fields of Application
(Reprinted from Brit.J.Appl.Phys. 6, 391-399 (1955))
K.C.A. Smith and C.W. Oatley2.3 Building a Scanning Electron Microscope
O.C. Wells2.4A Contrast Formation in the Scanning Electron Microscope
T.E. Everhart2.4B 'Wide-band Detector for Micro-microampere Low-energy Electron Currents'
(Reprinted from J. Sci. Inst., 37, pp.246-248) T.E. Everhart and R.F.M. Thornley2.5 A Simple Scanning Electron Microscope
P.J. Spreadbury2.6 New Applications of the Scanning Electron Microscope R.F.M. Thornley
2.7A A.D.G. Stewart and an Early Biological Application of the Scanning Electron Microscope
A. Boyde2.7B Investigation of the Topography of Ion Bombarded Surfaces with a Scanning Electron Microscope
(Reprinted from ‘5 th International Congress for Electron Microscopy’,
Philadelphia, PA, S.S Breeze, ed Academic Press, New York,1962, paper D-12.)
A.D.G. Stewart2.8 The Scanning Electron Microscopy of Hot and Electron-Emitting Specimens
H. Ahmed2.9A Towards Higher Resolution Scanning Electron Microscopy
R.F.W. Pease2.9B High Resolution Scanning Electron Microscopy (Reprinted from J.Sci.Instrum. 42, 81-85 (1965))
R.F.W. Pease and W.C. Nixon2.10 The Application of the Scanning Electron Microscope to Microfabrication and Nanofabrication
A.N. Broers2.11 Scanning Electron Diffraction: A Survey of the Work of C.W.B. Grigson.
D. McMullan
Part III THE DEVELOPMENT OF ELECTRON PROBE INSTRUMENTS
AT THE CAVENDISH LABORATORY
AND THE TUBE INVESTMENTS RESEARCH LABORATORY
3.1 The Development of the X-ray Projection Microscope and the X-ray Microprobe Analyser at the Cavendish Laboratory, Cambridge, 1946-60
(Extracts reprinted from Contemp. Phys. 22, 3-36 (1981)) V.E. Cosslett3.2A The Contributions of W.C Nixon and J.V.P. Long to X-ray Microscopy and Microanalysis: Introduction
P. Duncumb3.2B X-Ray Projection Microscopy
(Extract reprinted from X-ray Optics and Microanalysis 1992(Inst. Phys. Conf. Ser. 130)
W.C. Nixon3.2C Microanalysis
(Reprinted from X-ray Optics and Microanalysis 1992 (Inst. Phys. Conf. Ser. 130)
J.V.P. Long3.3A Development of the Scanning Electron Probe Microanalyser, 1953-1965
Peter Duncumb3.3B Micro-analysis by a Flying-Spot X-Ray Method (Reprinted from Nature, No. 4521, p. 1173 (1956)) V.E. Cosslett and P. Duncumb
3.4 Tube Investments Research Laboratories and the Scanning Electron Probe Microanalyser
D. A. Melford
Part IV COMMERCIAL DEVELOPMENT
4.1A Commercial Exploitation of Research Initiated by Sir Charles Oatley
K.C.A. Smith4.1B . AEI Electron Microscopes – Background to the Development of a Commercial Scanning Electron Microscope
A.W. Agar4.2A Microscan to Stereoscan at the Cambridge Instrument Company
M.A. Snelling4.2B A New Scanning Electron Microscope (Reprinted from Third European Regional Conference on Electron Microscopy, Prague (1964))
A.D.G. Stewart and M.A. Snelling4.3 Memories of the Scanning Electron Microscope at the Cambridge Instrument Company
D. J. Unwin4.4 From Microscopy to Lithography
B. A. Wallman4.5 Commercial Electron Beam Lithography in Cambridge, 1973 - 1999
J. M. Sturrock
Part V Epilogue
5.1 Charles Oatley: The Later Years
The Editors5.2 The detective quantum efficiency of the scintillator/photomultiplier in the scanning electron microscope.
(Reprinted from J Microscopy, 139, Pt2, 153-166 1985.)
C.W. Oatley5.3 Professor Oatley Remembered
E. Munro5.4 Recollections of Professor Oatley’s Reincarnation as a Research Student
G. Owen5.5 My Life with the Stereoscan
B. C. Breton5.6 Research at the Cambridge University Engineering Department Post-Stereoscan – Introduction
K.C.A. Smith5.7 The Development of Biological Scanning Electron Microscopy and X-ray Microanalysis P. Echlin
5.8 From the Scanning Electron Microscope to Nanolithography
J.R.A. Cleaver
Appendices
Appendix I
Sir Charles William Oatley O.B.E.
(Reprinted from Biog. Mems. Fell. Roy. Soc. Lond. 40, 63-84 (1994))
K.C.A. Smith
Appendix II
A History of the Scanning Electron Microscope, 1928 - 1965
(Based on "Scanning Electron Microscopy 1928-1965", Scanning17,
175-185 (1995))
D. McMullan
Appendix III
The Cambridge Instrument Company. and Electron-optical Innovation
(Extracts reprinted from "Innovation in Electron-Optical Instruments –Two British Case Histories" Research Policy 1, 174-207 (1971/72))
P. Jervis
Charles Oatley: Father of Modern Scanning Electron Microscopy
K. C. A. Smith and D. McMullan